Resist Patterning Characteristics using KrF Laser-ablation Process

Study of laser ablation using nano-second laser pulses

 In this paper, the laser ablation process based on the irradiation of nanosecond pulsed lasers on a copper target surface in the presence of Helium gas is studied. The dynamical behaviors of the generated plasma in the helium gas and evaporated copper at the atmospheric pressure are examined using a laser pulse, laser wavelength of and intensity of 7×1010W/cm2. A one-dimensional thermal model ...

Nanometer-Scale Patterning on PMMA Resist by Force Microscopy Lithography

Nanoscale science and technology has today mainly focused on the fabrication of nano devices. In this paper, we study the use of lithography process to build the desired nanostructures directly. Nanolithography on polymethylmethacrylate (PMMA) surface is carried out by using Atomic Force Microscope (AFM) equipped with silicon tip, in contact mode. The analysis of the results shows that the ...

Fast - Discharge - Initiated KrF Laser

Intense laser emission has been observed from the KrF molecule formed by a chemical reaction initiated by fast-discharge circuitry. With a gas mixture of He:Kr:NF, = 500:50:1 and a sample pressure of 700 Torr, an output energy of 0. 8 mj was measured from a 25-nsec laser pulse (FWHM). Spectral analysis of the laser emission indicated laser action at 248.5 and 249.5 nm.

Removal Versus Ablation in KrF Dry Laser Cleaning of Polystyrene Particles from Silicon

Nanosecond Laser Surface Patterning of Bio Grade 316L Stainless Steel for Controlling its Wettability Characteristics

In this work, potential of the nanosecond laser processing technique on manipulating the surface wettability of 316L bio grade stainless steel is investigated. Results show that the steel wettability toward water, improves significantly after the laser treatment. Different analyses are assessed in correlation with wettability using Scanning Electron Microscope (SEM), Scanning Tunneling Microsco...